Rigaku Technology for the UltimateVacuum Solutions. Manufacture, Sale, and Repair of Magnetic Seals using Magnetic Fluid.

What is a Rotary Feedthrough?

Point1 cleanPoint2 high vacuumPoint3 long service life

A rotary feedthrough is a rotary seal used in advanced industrial applications such as semiconductor production devices, FPD production devices, and photovoltaic cell production devices. The rotary feedthrough sealed with magnetic fluid is a non-contact seal, is Clean, works in a High Vacuum and has a Long Service Life, compared with contact seals such as oil seals.

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Products

The Rigaku's magnetic fluid sealed rotary feedthroughs are known as "Magnetic Seals". The " Magnetic Seals" have many advantages compared with the rotary feedthroughs of other companies.

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Rigaku magnetic seals

Common Specifications / Explanation of designations of Rigaku Magnetic Seals/ Explanation of flange types


Catalog of standard products

Miniature F1B-B / Miniature F2B-B / Miniature BSB-B / Miniature LSB-B / Miniature FMB-B / Standard F1B-B / Standard FMB-B / Standard F2B-B / Standard KMB-B / Cantilever F1B-C / Cantilever FMB-C / Cantilever CMB-C / Standard F1T-B / Standard NFT-B / Cantilever F1T-C


Custom-made models

Multiaxial Seals / With Bellows / Dustproof Seals /
High-Pressure Type / With Purge Port / Cantilevered Type / Vacuum Chuck Mechanism / Direct Drive /
For Ultra-High Vacuum


Ultra precision rotary stage with the self-calibration rotary encoder

Rigaku enables highly precise measurement and control in various applications such as R&D, high-end machine tools, precise geodetic survey and so on.

  • Compact :Enable to process 8 channel signals collectively on a single board
  • High Speed :Reduce system delay; output the self-calibration signals in real-time
  • Ultra precision : Full closed-loop control based on the self-calibration signal

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Frequently Asked Questions