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Common Specification
Common Specification
| Vacuum integrity | 10-6Pa ~ 100ｋPa | |
|---|---|---|
| Pressure differential | 250kPa | |
| Operating temp. range | -10°C~100°C | |
| Leakage rate | 1.3 x 10-12Pam3/sec(He) or less | |
| Atmosphere | For vacuum, inert gas, active gas | |
| Standard accessories | O-rings, washers and nuts (BS, LS series) |
|
| Materials | Case : SUS 303 | |
| Shaft : SUS 630 | ||
| Pole piece : SUS 630 | ||
| Bearing lubrication | Vacuum side: High-vacuum grease | |
| Atmosphere side: Grease with anti-corrosive agent | ||
| magnetic fluid base oil | Standard: Alkyl naphthalene | |
| For active gases: perfluoro-polyether | ||
Qualitative values contained in catalogs are derived from the results of tests conducted by Rigaku Mechatronics Co., Ltd. Rigaku does not guarantee that similar results can always be obtained in other environments. Company and product names mentioned in catalogs are trademarks or registered trademarks of their respective companies. Specifications, appearances, and other items are subject to change due to product improvements. We appreciate your understanding.
