TOP > Applications > Applications (Vacuum transport robot, CVD equipment, Sputtering systems, Ion implanter, Single crystal growth, Vacuum chuck mechanism)

Applications

Vacuum transport robot

Proposing highly sophisticated robot seals.

As applications for clean/vacuum robots become more diverse, Rigaku's rotary feedthrough units are constantly being designed to satisfy customer specifications.
Thanks to Rigaku's advanced technologies, the center deviation has been reduced to support positioning accuracy for large-size FPD substrates and semiconductor wafers. Rigaku aims to satisfy diverse customer needs such as those with pressure differential seals or bellows seals (linear reciprocating motion).

  • Satisfying customer needs with tip displacement-free, high-precision, multi-axial seals combined with high-precision processing technologies developed with Rigaku X-ray diffractometers.
  • The unique magnetic circuit, free from magnetic field interference between the seals, makes multi-axial seals compact.
  • High-precision technologies for producing powerful magnets and pole pieces enable the manufacture of large seals with a diameter of 100 mm or more.
  • Thin, dustproof seals that can withstand pressure differentials of 20 kPa or less can be manufactured.
Other applications

CVD equipment / Sputtering systems / Ion implanter / Single crystal growth / Vacuum chuck mechanism / Vacuum furnace / Pressurized furnace / Etching systems / X-ray generator / Stirrer / Gas induction mechanism / Arc discharger / Epitaxial growth system

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CVD equipment

Offering rotary feedthroughs that can withstand high-temperature inert gas.

After considerable research and testing, Rigaku has succeeded in developing a new magnetic fluid that generates hardly any gas at high temperatures.
This new magnetic fluid and the improved rotary feedthrough structure extends the service life of the rotary feedthrough unit under service conditions that are regarded as being impossible for the seals used in CVD equipment.

Even, smooth rotation contributes to the formation of a film with a uniform thickness.



Cantilevered type (F1-20-W)

Other applications

Vacuum transport robot / Sputtering systems / Ion implanter / Single crystal growth / Vacuum chuck mechanism / Vacuum furnace / Pressurized furnace / Etching systems / X-ray generator / Stirrer / Gas induction mechanism / Arc discharger / Epitaxial growth system

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Sputtering systems

Magnetic seals with reduced magnetic flux leakage.

Magnetic flux leakage, which is considered unavoidable with rotary feedthroughs, is no stronger than the Earth's magnetic field at a point 10 mm from the case, thanks to Rigaku's unique design. Thus, you can use these seals freely, without having to worry about their effect on plasma ions and electrons.



Cantilevered type (F1-CL series, with no bearing on the vacuum side. )

Other applications

Vacuum transport robot / CVD equipment / Ion implanter / Single crystal growth / Vacuum chuck mechanism / Vacuum furnace / Pressurized furnace / Etching systems / X-ray generator / Stirrer / Gas induction mechanism / Arc discharger / Epitaxial growth system

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Ion implanter

Transmitting high-speed rotation while minimizing center distortion and resonance.

  • Rigaku's unique technologies enable high-speed rotation while suppressing resonance.
  • Long service life with less center distortion even with high-temperature, high-vacuum, and high-load applications.
  • Rigaku can manufacture rotary feedthrough units for use in all types of ion implanter.


Cantilevered type (F1-CL series, with no bearing on the vacuum side. )

Other applications

Vacuum transport robot / CVD equipment / Sputtering systems / Single crystal growth / Vacuum chuck mechanism / Vacuum furnace / Pressurized furnace / Etching systems / X-ray generator / Stirrer / Gas induction mechanism / Arc discharger / Epitaxial growth system

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Single crystal growth

Excellent magnetic field resistance.

Experiment results

Pulling up crystal ingots exceeding 300 mm in diameter requires a powerful magnetic field, such as in the case of the MCZ method, the cusped magnetic field method, and so on. The rotary feedthroughs used with these methods should not be affected by the magnetic field. Rigaku's unique rotary feedthrough structure, which is resistant to magnetic fields, has been proven effective in applications involving the pulling up of ingots with a diameter of 400 mm at SSi.

Other applications

Vacuum transport robot / CVD equipment / Sputtering systems / Ion implanter / Vacuum chuck mechanism / Vacuum furnace / Pressurized furnace / Etching systems / X-ray generator / Stirrer / Gas induction mechanism / Arc discharger / Epitaxial growth system

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Vacuum chuck mechanism

Ideal for sample adsorption

  • Wafers can be adsorbed firmly without being scratched during transport, or and LCD glass substrates during high-speed rotation using a spin coater, etc.
  • Demand is gradually increasing for rotary feedthroughs for use in vacuum chucks because they offer the advantage of permitting vacuuming through them, thereby eliminating unnecessary space and, in addition, they can offer stable rotation.



Vacuum chuck mechanism

Other applications

Vacuum transport robot / CVD equipment / Sputtering systems / Ion implanter / Single crystal growth / Vacuum furnace / Pressurized furnace / Etching systems / X-ray generator / Stirrer / Gas induction mechanism / Arc discharger / Epitaxial growth system

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