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Applications

Etching systems

Developing rotary feedthroughs that can satisfy a wide range of specifications.

A range of specifications and processing methods for use in etching systems, such as those for inert gas, high temperature, high-speed rotation, plasma, electrodes, iron beams, strong magnetic fields, and leakage of magnetic flux.
Rigaku's rotary feedthroughs continue to rise to any challenge, with the aim of covering every area in which conventional rotary feedthroughs are thought to be unusable.



Other applications

Roll-to-roll processing equipment / Vacuum transport robot / CVD equipment / Sputtering systems / Ion implanter / Single crystal growth / Vacuum chuck mechanism / Vacuum furnace / Pressurized furnace / X-ray generator / Stirrer / Gas induction mechanism / Arc discharger / Epitaxial growth system

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