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Applications

Gas induction mechanism

Introduction of gas from a rotary Feedthrough -- a barely known technique!

The introduction of gas from a rotary feedthrough can be largely divided into two cases: Introduction of purge gas to protect the seal unit and the introduction of reactant gas into equipment from a rotary feedthrough. In either case, by introducing gas via the rotary feedthrough, the equipment can be made simpler and more efficient.

With a purge mechanism

With a gas induction mechanism

Notes

Magnetic seals for Gas induction mechanism are custom made products.
Please tell us gas of environment, temperature range, required shape, load and tolerance of size from here.
We will advise you the best solution.


Other applications

Roll-to-roll processing equipment / Vacuum transport robot / CVD equipment / Sputtering systems / Ion implanter / Single crystal growth / Vacuum chuck mechanism / Vacuum furnace / Pressurized furnace / Etching systems / X-ray generator / Stirrer / Arc discharger / Epitaxial growth system

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