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Common Specification

Common Specification

Vacuum integrity 10-6Pa ~ 100kPa
Pressure differential 250kPa
Operating temp. range -10°C~100°C
Leakage rate 1.3 x 10-12Pam3/sec(He) or less
Atmosphere For vacuum, inert gas, active gas
Standard accessories O-rings, washers and nuts
(BS, LS series)
Materials Case : SUS 303
Shaft : SUS 630
Pole piece : SUS 630
Bearing lubrication Vacuum side:  High-vacuum grease
Atmosphere side:  Grease with anti-corrosive agent
magnetic fluid base oil Standard:  Alkyl naphthalene
For active gases:  perfluoro-polyether

Qualitative values contained in catalogs are derived from the results of tests conducted by Rigaku Mechatronics Co., Ltd. Rigaku does not guarantee that similar results can always be obtained in other environments. Company and product names mentioned in catalogs are trademarks or registered trademarks of their respective companies. Specifications, appearances, and other items are subject to change due to product improvements. We appreciate your understanding.

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